Orientational material, orientational substrate and surface acou

Details Orientational material, orientational substrate and surface acou Orientational material, orientational substrate and surface acou

1994-12-22

1996-10-15

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, 310360, H01L 4108

Patent

active

055657249

ABSTRACT:
An orientational material including: diamond, and a ZnO film disposed on a surface of (111) orientational diamond provided by the diamond. Such an orientational material may suitably be used as a component for fabricating a surface acoustic wave device utilizing diamond.

REFERENCES:
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patent: 5373268 (1994-12-01), Dworsky et al.
patent: 5402029 (1995-03-01), Nakamura et al.
patent: 5419969 (1995-05-01), Miyazaki et al.
patent: 5446329 (1995-08-01), Nakahata et al.
Patent Abstracts of Japan, vol. 17, No. 434 (E-1412), Aug. 11, 1993 and JP-A-05 090888 (Sumitomo Electric Ind Ltd) Apr. 9, 1993.
Yamanouchi et al., "Saw Propagation Characteristics and Fabrication Technology of Piezoelectric Thin Film/Diamond Structure", Proceedings of the Ultrasonics Symposium, Montreal, Oct. 3-6, 1989, vol. 1, Oct. 1989, pp. 351-354.
Akio Hiraki and Hiroshi Kawarada "Diamond-Like Carbon Thin Films".

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