Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate
2007-09-11
2007-09-11
Moore, Margaret G. (Department: 1712)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From silicon reactant having at least one...
C106S287150, C556S450000, C528S043000
Reexamination Certificate
active
11262237
ABSTRACT:
This invention is directed to a method of making a composition in which a silane having an unsaturated group and a silane having an aromatic group are hydrolyzed. In this method the more highly reactive silane is continuously added during the hydrolysis reaction of the less reactive silane. The composition can be used in the fabrication of microelectronic devices, particularly as hardmasks or etchstops.
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Gombar-Fetner Sheila
Mills Lynne K.
Townsend, III Paul H.
Dow Global Technologies Inc.
Moore Margaret G.
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