Organometallic source compounds for chemical vapor deposition

Details Organometallic source compounds for chemical vapor deposition Organometallic source compounds for chemical vapor deposition

1997-12-01

1999-04-06

Geist, Gary

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

564511, C07F 710

Patent

active

058920838

ABSTRACT:
Compounds of the formula

REFERENCES:
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CA:115220101 abs of "Synthesis and Chemistry of the bis(trimethylsilyl) amido bis tetra hydrofuranates of Group 2 metals magnesium ,calcium , strontium and barium", Bradley, Polyhedron, 9 (24), pp. 2959-2964, 1990.
Inorg Chem, Gindelberger "Preparation and Properties of Mg, Ca, Sr, and Ba Selenolates and Tellurolates". 33, pp. 6293-6299, Dec. 1994.
CA: 121:314489 abs of Gindelberger's Inorganic chem paper 33(26) pp. 6293-6299, Dec. 1994.
CA:126:126085 abs of "1,3-Bis (trimethylsilyl)-2-phenyl-1-aza-3-phosphapropenide Anions as Bidentate Ligands", Westerhausen, Inor Chem, 36(4) pp. 521-527, Feb. 1997.

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