Organometallic precursor compounds

Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing

Reexamination Certificate

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C556S040000, C556S041000, C556S059000

Reexamination Certificate

active

11037085

ABSTRACT:
This invention relates to organometallic precursor compounds represented by the formula (L)M(L′)2(NO) wherein M is a Group 6 metal, L is a substituted or unsubstituted anionic ligand and L′ is the same or different and is a π acceptor ligand, a process for producing the organometallic precursor compounds, and a method for producing a film, coating or powder from the organometallic precursor compounds.

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Gordon et al., “Low-temperature atmospheric-pressure metal-organic chemical vapor deposition of molybdenum nitride thin films”,Thin Solid Films1996 288 116.
Van den hove et al, “Lithography for sub-90nm applications”,IEEE2002.
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Legzdins et al., Dicarbonyl (η5-Cyclopentadienyl)Nitrosyl Complexes of Chromium, Molybdenum, and Tungsten,Inorg. Synth, 1990, 28, 196.

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