Organometallic compounds and processes for preparation thereof

Details Organometallic compounds and processes for preparation thereof Organometallic compounds and processes for preparation thereof

2011-06-14

2011-06-14

Kosack, Joseph R (Department: 1626)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

Reexamination Certificate

active

07960565

ABSTRACT:
This invention relates to organometallic compounds represented by the formula LML′ wherein M is a metal or metalloid, L is a substituted or unsubstituted cyclopentadienyl group or cyclopentadienyl-like group, a substituted or unsubstituted pentadienyl group or pentadienyl-like group, or a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, and L′ is a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.

REFERENCES:
patent: 6884901 (2005-04-01), Thompson et al.
patent: 2007/0054487 (2007-03-01), Ma et al.
patent: 2007/0077750 (2007-04-01), Ma et al.
Kelly et al. “Azaruthenocenes: Preparation of [(n5-C4Me4N)Ru(n5-C5Me5)] and [(n5-C4Me4N)2Ru], the First Ruthenium Metallocenes Incorporating n5-Pyrrolyl Ligands” Organometallics, 1992, vol. 11, pp. 4348-4350.
Garrett et al. “Nucleophilic Catalysts with pi-Bound Nitrogen Heterocycles: Synthesis of the First Ruthenium Catalysts and Comparison of the Reactivity and the Enantioselectivity of Ruthenium and Iron Complexes” Journal of the American Chemical Society, 1998, vol. 120, pp. 7479-7483.
DuBois et al. “The activation of η5-pyrrole complexes toward nucleophilic attack”,Coordination Chemistry Reviews174 (1998) 191-205.
DuBois et al., Nucleophilic Substitution of η5-Pyrrolyl Ligands in Ruthenium (II) Complexes,Organometallics1997, 16, 2325-2334.
Garrett et al., “Nucleophilic Catalysts with pi-Bound Nitrogen Heterocycles: Synthesis of the First Ruthenium Catalysts and Comparison of the Reactivity and the Enantioselectivity of Ruthenium and Iron Complexes”Journal of the American Chemical Society, 1998, vol. 120, pp. 7479-7483.
Kelly et al. “Azaruthenocenes: Preparation of [n5-C4Me4N)Ru(n5-05Me5)] and [n5-C4Me4N)2Ru], the First Ruthenium Metallocenes Incorporating n5-Pyrrolyl Ligands”Organometallics, 1992, vol. 11, pp. 4348-4350.
Lim et al., “Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates”,Inorganic Chem, PREPRINT.
McComas et al. Neutral Ru(η5-pyrrole) Complexes. Synthesis and Structure of Diazaruthenocenes and Ru(1—3:5. 6-η5-C8H11) (η5-pyrrole) Complexes,Organometallics 2000, 19, 2853-2857.
Perera et al. “Ruthenium Complexes Bearing n5-Pyrazolato Ligands”J. Am. Chem. Soc. 1999, 121, 4536-4537.
Platinum Metals Rev. “Potential Uses of Ruthenium-Molybdenum and Ruthenium-Tungsten Alloys” 1973, 17 (4), p. 143.
Vendemiata et al. “Paramagnetic Bis(amidinate) Iron (II) Complexes and their Diamagnetic Dicarbonyl Derivatives”Eur. J. Inorg. Chem. 2001, 707-711.

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