Organometallic compounds and mixtures thereof

Details Organometallic compounds and mixtures thereof Organometallic compounds and mixtures thereof

2005-09-01

2009-11-17

Saeed, Kamal A (Department: 1626)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

Reexamination Certificate

active

07619093

ABSTRACT:
This invention relates to organometallic compounds represented by the formula LML′ wherein M is a metal or metalloid, L is a substituted or unsubstituted cyclopentadienyl group or cyclopentadienyl-like group, a substituted or unsubstituted pentadienyl group or pentadienyl-like group, or a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, and L′ is a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.

REFERENCES:
patent: 2004/0127732 (2004-07-01), Thompson et al.
patent: 2007/0054487 (2007-03-01), Ma et al.
patent: 2007/0077750 (2007-04-01), Ma et al.
Kelly et al. “Azaruthenocenes: Preparation of [(n5-C4Me4N)Ru(n5-C5Me5)] and [(n5-C4Me4N)2Ru], the First Ruthenium Metallocenes Incorporating n5-Pyrrolyl Ligands” Organometallics, 1992, vol. 11, pp. 4348-4350.
Smith, F. J. “Potential Uses of Ruthenium-Molybdenum and Ruthenium-Tungsten Alloys” Platinum Metals Rev., 1973, vol. 17, No. 4, p. 143.
Garrett et al. “Nucleophilic Catalysts with pi-Bound Nitrogen Heterocycles: Synthesis of the First Ruthenium Catalysts and Comparison of the Reactivity and the Enantioselectivity of Ruthenium and Iron Complexes” Journal of the American Chemical Society, 1998, vol. 120, pp. 7479-7483.
Perera, et al., “Ruthenium Complexes Bearing n5-Pyrazolato Ligands” J. Am. Chem. Soc. 1999, 121, 4536-4537.
McComas et al., Neutral Ru(n5-pyrrole) Complexes. Synthesis and Structure of Diazaruthenocenes and Ru(1—3:5. 6-η5-C8H11)(η5-pyrrole) Complexes,Organometallics 2000,19, 2853-2857.
M. Rakowski DuBois, “The activation of η5-pyrrole complexes toward nucleophilic attack”,Coordination Chemistry Reviews174 (1998) 191-205.
M. Rakowski DuBois et al., Nucleophilic Substitution of η5-Pyrrolyl Ligands in Ruthenium (II) Complexes,Organometallics1997, 16, 2325-2334.
Beatrice Vendemiata, et al., “Paramagnetic Bis(amidinate) Iron (II) Complexes and their Diamagnetic Dicarbonyl Derivatives”Eur. J. Inorg. Chem. 2001, 707-711.
Booyong S. Lim et al., “Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates”,Inorganic Chem, PREPRINT.
Booyong S. Lim et al., “Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates”,Inorganic Chem, PREPRINT, 2003.

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