Organometallic compounds

Details Organometallic compounds Organometallic compounds

1991-11-08

1992-09-22

Dees, Jose G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 19, 556 20, 556 22, 556 30, 556174, 556 27, 546 4, 546 5, 548102, 548103, C07F 500, C07F 506, C07F 1900

Patent

active

051498537

ABSTRACT:
In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.

REFERENCES:
patent: 5030741 (1991-07-01), Erdmann et al.
patent: 5099044 (1992-03-01), Erdmann et al.

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