Organometallic compound vaporizing/feeding system

Details Organometallic compound vaporizing/feeding system Organometallic compound vaporizing/feeding system

2006-01-17

2006-01-17

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C356S036000

Reexamination Certificate

active

06987565

ABSTRACT:
An organometallic compound vaporizing and feeding system includes a carrier gas feed passageway connecting a carrier gas source to a container containing an organometallic compound MO and having a carrier gas mass flow controller, an MO gas passageway connecting the container to an in-line monitor for transporting the MO gas, a sample gas passageway connecting the in-line monitor to a sample inlet of an ICP spectrometer, a standard gas passageway connecting a gas cylinder filled with a calibration standard gas to the sample gas passageway and having a standard gas mass flow controller, and a diluent gas passageway connected to the standard gas passageway for passing a diluent gas for adjusting the concentration of the standard gas and having a diluent gas mass flow controller.

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