Organometallic antimony compounds useful in chemical vapor depos

Details Organometallic antimony compounds useful in chemical vapor depos Organometallic antimony compounds useful in chemical vapor depos

1989-09-29

1990-10-02

Prescott, Arthur C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C07F 990, C07F 992

Patent

active

049609165

ABSTRACT:
Organometallic antimony compounds having increased stability that are use in chemical vapor deposition processes are provided which comprise stibines containing sterically-demanding ligands, stibines lacking beta hydrogen atoms, or aromatic stibines. These compounds will generally have the formula:

REFERENCES:
patent: 3975218 (1976-08-01), Ruehrwein
patent: 4010045 (1976-04-01), Ruehrwein
patent: 4377528 (1983-03-01), Beach et al.
patent: 4404408 (1983-09-01), Wirth et al.
patent: 4734514 (1988-03-01), Melas et al.

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