Organic stripping composition

Details Organic stripping composition Organic stripping composition

1992-11-30

1995-05-23

Lieberman, Paul

Compositions

Compositions containing a single chemical reactant or plural...

Organic reactant

252171, 252156, 252158, 252364, 252DIG8, 134 38, C09D 900

Patent

active

054178770

ABSTRACT:
Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

REFERENCES:
patent: 3972839 (1976-07-01), Murphy
patent: 4276186 (1981-06-01), Bakos et al.
patent: 4539230 (1985-09-01), Shimizu et al.
patent: 4737195 (1988-04-01), Carandang et al.
patent: 4770713 (1988-09-01), Ward

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