Organic stripping composition

Details Organic stripping composition Organic stripping composition

1995-05-22

1996-03-05

Lieberman, Paul

Compositions

Compositions containing a single chemical reactant or plural...

Organic reactant

134 38, 252162, 252171, 252364, 252393, 252394, 252395, 252396, 252548, 252DIG8, C09D 900, C11D 343, C11D 344

Patent

active

054964911

ABSTRACT:
Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

REFERENCES:
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patent: 4539230 (1985-09-01), Shimizu et al.
patent: 4617251 (1986-10-01), Sizensky et al.
patent: 4737195 (1988-04-01), Carandang et al.
patent: 4859418 (1989-08-01), Ohlendorf et al.
patent: 5190723 (1993-03-01), Phillips et al.
patent: 5334332 (1994-08-01), Lee
patent: 5417877 (1995-05-01), Ward

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