Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Patent
1991-05-01
1994-05-24
Crane, Sara W.
Active solid-state devices (e.g., transistors, solid-state diode
Thin active physical layer which is
Heterojunction
257 40, 257184, H01L 2928
Patent
active
053151291
ABSTRACT:
Organic optoelectronic devices, such as a modulator (54) and a photodetector (73) comprising alternating layers (58) of two crystalline planar organic aromatic semiconductors (60 and 62), have been grown by organic molecular beam deposition. These organic substances have been deposited in ultra-thin layers only 10 .ANG. in depth using organic molecular beam deposition methods. Due to the anisotropic character of these organic materials,, the devices formed using these methods possess unique electronic and optical properties. The preferred embodiment of the invention utilizes 3,4,9,10-perylenetetracarboxylic dianhydride (PTCDA) and 3,4,7,8-naphthalenetetracarboxylic dianhydride (NTCDA). While the inventors have identified PTCDA and NTCDA as excellent materials for the manufacture of organic optoelectronic IC devices, the broad scope of the present invention encompasses the use of any planar organic aromatic semiconductor which readily forms a crystalline structure. The preferred method of the invention employs a chamber (23) containing an inorganic substrate (32) with appropriate material for making electrical contact to the organic structures and sources of PTCDA (36) and NTCDA (38). The chamber (23) is maintained at a pressure which is generally less than 10.sup. -6 Torr. The substrate (32) is separated from the source materials by a minimum separation distance of 10 cm. The substrate (32) is held below 150K while the PTCDA and NTCDA are alternately heated. The methods described above may also be employed to fabricate an organic phototransistor/photodetector (78).
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F. F. So et al., "Quasi-Epitaxial Growth of Organic Multiple Quantum Well Structures by Organic Molecular Beam Deposition", in Applied Physics Letters, vol. 56, No. 7, pp. 674-676 (Feb. 12, 1990).
Turek, P., et al., "A New Series of Molecular Semiconductors . . . ," J. Am. Chem. Soc., 1987, 109, pp. 5119-5122.
Forrest Stephen R.
So Franky F.
Crane Sara W.
University of Southern California
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