Organic compound for CVD raw material and method of...

Details Organic compound for CVD raw material and method of... Organic compound for CVD raw material and method of...

2006-02-21

2006-02-21

Nazario-Gonzalez, Porfirio (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C106S001210, C106S128100, C427S248100, C427S587000

Reexamination Certificate

active

07002032

ABSTRACT:
The present invention provides an organic compound for CVD raw material prepared by mixing a first organometallic compound and at least one second organometallic compound, said first organometallic compound having a central metal atom and at least one ligand coordinated thereto and said second organic compound having the same central metal as that of the first organometallic compound and at least one different ligand coordinated thereto from the ligand of the first organometallic compound, wherein the first and second organometallic compounds differ in decomposition behavior. In particular, a CVD raw material having both easy handling and good adhesiveness to thin film, which have not been so far sufficiently compatible with each other, can be obtained by mixing a cyclopentadienyl complex or a derivative thereof as the first organometallic compound, and a β-diketonato compound as the second organometallic compound.

REFERENCES:
patent: 5952047 (1999-09-01), Tasaki et al.
patent: 6037485 (2000-03-01), Tasaki et al.
patent: 10-324970 (1998-12-01), None
patent: WO 98/00432 (1998-01-01), None

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