Optoelectronic system for determining surface irregularities of

Details Optoelectronic system for determining surface irregularities of Optoelectronic system for determining surface irregularities of

1988-12-01

1991-03-26

Moore, David K.

Image analysis

Histogram processing

For setting a threshold

356376, 358106, 382 8, G06K 948

Patent

active

050036157

ABSTRACT:
By comparing the distorted image of an edge pattern, such as a checker board pattern, reflected from the surface of a work piece, such as a silicon wafer, and received by a solid state television camera, with a similar image, reflected from the optically flat surface of a calibration piece substituted for the work piece, surface height irregularities, such as warpage, of the work piece can be measured with a high sensitivity and a large dynamic range at relatively low cost.

REFERENCES:
patent: 4707734 (1987-11-01), Labinger et al.
patent: 4783826 (1988-11-01), Koso
patent: 4792232 (1988-12-01), Jobe et al.
patent: 4802759 (1989-02-01), Matsumoto et al.
patent: 4895448 (1990-01-01), Laird

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