Optoelectronic device with patterned ion implant subcollector

Active solid-state devices (e.g. – transistors – solid-state diode – With specified impurity concentration gradient – With high resistivity

Reexamination Certificate

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Details

C257S010000, C257S227000, C257S292000, C257S458000

Reexamination Certificate

active

10895517

ABSTRACT:
In one embodiment, an optoelectronic device is provided having a pin photo diode including a semi-insulating substrate or layer, with a patterned implant region of a first dopant type. The pin photo diode includes an upper layer having semiconductor material with a second dopant type. An intermediate layer is provided having a substantially intrinsic semiconductor material. An upper layer contact is provided having a portion with a generally circular interior facing edge. The implant region has a first portion having an outer periphery substantially nonoverlapping with the interior facing edge of the upper layer contact. The implant region includes a contact portion located beyond the upper layer contact. A connecting portion couples the first portion and the contact portion of the implant region. In one embodiment, the device includes a heterojunction bipolar transistor coupled to the pin photo diode. The transistor may have a patterned implant region in the semi-insulating substrate or layer comprising the first dopant type.

REFERENCES:
patent: 5098853 (1992-03-01), Clark et al.
patent: 5159423 (1992-10-01), Clark et al.
patent: 5168071 (1992-12-01), Fullowan et al.
patent: 5298438 (1994-03-01), Hill
patent: 5365101 (1994-11-01), Tonai
patent: 5391910 (1995-02-01), Fujimura et al.
patent: 5410175 (1995-04-01), Kyomasu et al.
patent: 5412229 (1995-05-01), Kuhara et al.
patent: 5412249 (1995-05-01), Hyugaji et al.
patent: 5557117 (1996-09-01), Matsuoka et al.
patent: 5606572 (1997-02-01), Swirhun et al.
patent: 5665614 (1997-09-01), Hafizi et al.
patent: 5672522 (1997-09-01), Streit et al.
patent: 5729033 (1998-03-01), Hafizi
patent: 5793790 (1998-08-01), Doi et al.
patent: 6005266 (1999-12-01), Forrest et al.
patent: 6027956 (2000-02-01), Irissou
patent: 6184054 (2001-02-01), Tsay
patent: 2002/0025597 (2002-02-01), Matsuda
patent: 2003/0164444 (2003-09-01), Yoneda et al.
patent: 2003/0168709 (2003-09-01), Kashiura
patent: 2004/0046182 (2004-03-01), Chen et al.
patent: 2004/0108445 (2004-06-01), Shiu
patent: 2004/0262619 (2004-12-01), Takahashi et al.
patent: 2005/0167709 (2005-08-01), Augusto
patent: 2006/0008933 (2006-01-01), Muller et al.
Huber, et al., InP-InGaAs Single HBT Technology for Photoreceiver OEIC's at 40 Gb/s and Beyond, Journal of Lightwave Technology, vol. 18, No. 7, pp. 992-1000, Jul. 2000.
Yung, et al., Highly Integrated InP HBT Optical Receivers, Journal of Solid-State Circuits, vol. 34, No. 2, pp. 219-227, Feb. 1999.
Sokolich, et al., InP HBT Integrated Circuit Technology with Selectively Implanted Subcollector and Regrown Device Layers, IEEE GaAs Digest, pp. 219-222, 2003.
Makiuchi, et al., Flip-Chip Planar GaInAs/InP p-i-n Photodiodes Analysis of Frequency Response, Journal of Lightwave Technology, vol. 14, No. 1, Jan. 1996.
Makiuchi, et al., Small -Junction-Area GaInAs/InP pin Photodiode with Monolithic Microlens, vol. 24, No. 2, pp. 109-110, 1988.
Makiuchi et al., GaInAs pin Photodioe/GaAs Preamplifier Photoreceiver for Gigabit-rate Communications Systems Using Flip-Chip Bonding Techniques, Electronics Setters, vol. 24, pp. 995-996, 1988.
Pedrotti et al., Monolithic Ultrahigh-Speed GaAs HBT Optical Integrated Receivers, GaAs IC Symposium, pp. 205-208, 1991.
Lauterbach et al., Advanced integrated planar InP/InGaAs/InP:Fe photoreceiver with slectively ion implanted p and n regions, Inst. Phys. Conf. Ser. No. 112; Chapter 8, paper presented at the Int. Symp. GaAs and Related Compounds, Jersey, 1990.
Matsuoka et al., Novel InP/InGaAs Double-Heterojunction Bipolar Transistors Suitable for High-Speed IC's and OEIC's, Conference Proceedings of the 6th International Conference on Indium Phosphide and Related Material (IPRM), pp. 555-558, (1994).
Haussler et al., Ion-implanted Planar pin Diodes in InP/GaInAs Layers Grown on Implanted InP:Fe, Electronics Letters, vol. 25, No. 17, pp. 1158-1159, Aug. 1989.

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