Optoelectronic apparatus and method for its fabrication

Multiplex communications – Wide area network – Packet switching

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350 9612, 350 9617, 350 9620, 350320, 370 3, 437 23, 437 51, 437234, 357 19, 357 30, 156625, G02B 612, H04J 100, H01L 2170, H01L 3112

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049697129

ABSTRACT:
An edge emitting optoelectronic source is integrally formed on a surface of a semiconductor substrate. An optical waveguide is integrally formed on the same surface of the substrate adjacent to the source. The waveguide is aligned with the source for optical coupling of the source to the waveguide. The waveguide comprises an optical diverter for diverting at least a portion of any light propagating along the waveguide toward the source through a surface of the waveguide. An optoelectronic detector is secured to that surface of the waveguide through which light is diverted for receiving light diverted through that surface. The resulting optoelectronic apparatus is suitable for launching and detecting optical signals in large volume bidirectional optical fiber transmission systems.

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patent: 4847665 (1989-07-01), Mand
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patent: 4904036 (1990-02-01), Blonder
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"GaInAsP/InP Lasers with Etched Mirrors by Reactive Ion Etching Using a Mixture of Ethane and Hydrogen", Matsui et al., Appl. Phys. Lett. 54 (13), 27 Mar. 1989.

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