Optoelectrical measuring system and apparatus

Details Optoelectrical measuring system and apparatus Optoelectrical measuring system and apparatus

1985-01-22

1989-08-22

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356446, G01B 1130, G01N 2155

Patent

active

048590622

ABSTRACT:
The invention relates to measuring the surface roughness of a sample. A beam of light is directed onto the surface and the scattered light distribution is measured using a detector array. Either the average deviation or the second moment of the scattered light distribution is then determined, which are measures of the surface roughness.

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Spiegel, Statistics, Schaum's Outline Series, McGraw-Hill, N.Y., 1961, Chapter 4, pp. 69 through 73.
Moan, O. B., "Application of Mathematics and Statistics to Reliability and Life Studies", in Reliability Handbook, Irsson, Editor-in-Chief, McGraw-Hill, N.Y., 1966, pp. 4-8 through 4-50.

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