Opto-lithographic device comprising a displaceable lens system a

Details Opto-lithographic device comprising a displaceable lens system a Opto-lithographic device comprising a displaceable lens system a

1986-10-14

1988-04-12

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 56, G03B 2742, G03B 2734, G03B 2740

Patent

active

047378239

ABSTRACT:
An opto-lithographic device comprising a lens system (13) arranged between a mask support (25) and a substrate table (33) and telecentric on one side, the lens system (13) and the mask support (25) being secured to a first holder (21) and a second holder (23), respectively, which can be displaced both simultaneously and relatively by means of a first actuator (183, 187, 189) and a second actuator (197, 199) for adjustment of focusing and enlargement. The invention provides the possibility of a simple correction of focusing and enlargement when this focusing and this enlargement are varied inter alia due to pressure or temperature variations.

REFERENCES:
patent: 3563648 (1971-02-01), Baggaley et al.
patent: 3735686 (1973-05-01), Brewer et al.
patent: 4140392 (1979-02-01), Lacombat et al.
patent: 4668077 (1987-05-01), Tanaka

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