Opto-isolators and method of manufacture

Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means

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357 55, 357 19, 250211J, 250551, 29599, H01L 2714

Patent

active

040400786

ABSTRACT:
Opto-isolators are disclosed which provide enhanced coupling between the light-emitting element and detector, and a method of manufacture is taught which permits efficient mass production of such devices. Recesses are etched in a silicon body and areas of the proper conductivity type are formed in the side walls to produce diodes, transistors or darlington pairs for light detection. Appropriate insulation and leads are then fabricated in the recesses to make contact to the detectors. In one embodiment, bonding pads are also formed at the bottom of the recesses along with associated conductors. Light emitting elements are then bonded to the pads on one major surface of the elements and wire bonded on the other major surfaces. The recesses are filled with an encapsulating material and the silicon body is etched apart to produce discrete devices.
In a further embodiment, the light-emitting elements are formed on an insulating board, encapsulated, and the board placed over the silicon body so that the elements project into the recesses. The body may then be etched apart to form discrete devices or isolation regions may be formed to produce a matrix array.

REFERENCES:
patent: 3319068 (1967-05-01), Beale et al.
patent: 3370174 (1968-02-01), Toussaint
patent: 3480783 (1969-11-01), Mankarious
patent: 3636358 (1972-01-01), Grosqburtz
patent: 3639770 (1972-02-01), Zizelmann
patent: 3699407 (1972-10-01), Gertler
patent: 3845318 (1974-10-01), Thillays
patent: 3914137 (1975-10-01), Huffman
patent: 3975751 (1976-08-01), Springthorpe

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