Opto-electronic focussing error detection arrangement

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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1791001G, G01D 136

Patent

active

042335027

ABSTRACT:
An opto-electronic focussing-error detection arrangement is described for the detection of a deviation between a radiation reflecting surface and the plane of focussing of an objective system. In the path of the beam which is reflected by the surface a beam-splitting element is disposed and behind said element two radiation-sensitive detectors are arranged which are each associated with one of the subbeams formed by the beam-splitting element. The detectors are grating-shaped detectors and are effectively divided into two detector sections by selection devices, the bounding line being adjustable. A focussing error signal is obtained which is highly independent of a positional error of the radiation-sensitive detection system relative to the beam axis.

REFERENCES:
patent: 4005260 (1977-01-01), Janssen
patent: 4006293 (1977-02-01), Bouwhuis et al.
patent: 4097730 (1978-06-01), Korpel
"Resistive-Insulated-Gate Arrays and Their Applications: An Exploratory Study", M. V. Whelan et al., Phillips Res. Repts. 30,436-482, 1975.

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