Optimized x-ray energy for high resolution imaging of...

Details Optimized x-ray energy for high resolution imaging of... Optimized x-ray energy for high resolution imaging of...

2008-07-01

2008-07-01

Kao, Chih-Cheng Glen (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S043000, C378S082000

Reexamination Certificate

active

07394890

ABSTRACT:
An x-ray imaging system uses particular emission lines that are optimized for imaging specific metallic structures in a semiconductor integrated circuit structures and optimized for the use with specific optical elements and scintillator materials. Such a system is distinguished from currently-existing x-ray imaging systems that primarily use the integral of all emission lines and the broad Bremstralung radiation. The disclosed system provides favorable imaging characteristics such as ability to enhance the contrast of certain materials in a sample, to use different contrast mechanisms in a single imaging system, and to increase the throughput of the system.

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Joachim Knoth, Harald Schneider and Heinrich Schwenke, Tunable exciting energies for total reflection x-ray fluorescence spectrometry using a tungsten anode and bandpass filtering, 1994, X-ray Spectrometry, vol. 23, 261-266.

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