Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-10-16
2007-10-16
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C359S565000
Reexamination Certificate
active
11038673
ABSTRACT:
A method and structure for optimizing an optical lithography illumination source may include a shaped diffractive optical element (DOE) interposed between the illuminator and a lens during the exposure of a photoresist layer over a semiconductor wafer. The DOE may, in some instances, increase depth of focus, improve the normalized image log-slope, and improve pattern fidelity. The DOE is customized for the particular pattern to be exposed. Description and depiction of a specific DOE for a specific pattern is provided. Additionally, a pupilgram having a particular pattern, and methods for providing a light output which forms the pupilgram, are disclosed.
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patent: 6452662 (2002-09-01), Mulkens et al.
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Frank Schellenberg, “A Little Light Magic”, IEEE Spectrum, Sep. 2003, pp. 34-39.
“LithoCruiser” Product Brochure, ASML MaskTools, 2002, 2 pages.
“LithoCruiser”, Product Brochure, ASML MaskTools, 2002, 3 pages.
Mackey Jeffrey L.
Stanton William A.
Micro)n Technology, Inc.
Nguyen Henry Hung
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