Optimized convection based mass airflow sensor

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

Patent

active

050941054

ABSTRACT:
A cylindrical heated airflow sensor for a constant temperature anenometer has a solid or tubular fused silica substrate with leads or terminals connected to each end. The sensor has a central heated section densely wound with resistive wire or covered with a resistive film, and an unheated section between the heated section and each terminal. Due to low heat conductivity of the substrate, the unheated section insulates the heated section from the terminals to improve the accuracy of the sensor at low airflow rates.

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