Optimized contact plug process

Details Optimized contact plug process Optimized contact plug process

1995-04-27

1996-07-09

Fourson, George

Fishing, trapping, and vermin destroying

437195, 437235, 437985, H01L 2144

Patent

active

055344607

ABSTRACT:
A method for optimizing the connection between active device regions in silicon, to overlying metallization levels, has been developed. A polysilicon contact plug process, consuming less area then conventional contacts, has been created. The highlight of this process is the complete conversion of residual polysilicon, in all areas except in the contact hole, to thermal oxide. The thermal oxide is then selectively removed, resulting in a polysilicon contact plug structure.

REFERENCES:
patent: 4214917 (1980-07-01), Clark et al.
patent: 4305760 (1981-12-01), Trudel
patent: 4568410 (1986-02-01), Thornquist
patent: 4808552 (1989-02-01), Andersen
patent: 5115296 (1992-05-01), Hsue et al.
patent: 5183781 (1993-02-01), Nakano
patent: 5196373 (1993-03-01), Beasom
patent: 5229326 (1993-07-01), Dennison et al.
patent: 5316978 (1994-05-01), Boyd et al.
S. Wolf et al "Silicon Processing for the VLSI Era vol. I" Lattice Press, Calif. (1986) pp. 182-185; 191-194.

Affiliated with

Also associated with

Rating

Optimized contact plug process does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optimized contact plug process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optimized contact plug process will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1867044