Optimization method and system having multiple inputs and multip

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364149, 364153, G05B 1304

Patent

active

057814309

ABSTRACT:
A method and system for optimizing a steady-state performance of a process having multiple inputs and multiple output-responses is provided. The method and system provide a unified and systematic way of optimizing nominal, statistical and multi-criteria performance of the process. The process can be inter alia a semiconductor manufacturing process or a business process.

REFERENCES:
patent: 5353229 (1994-10-01), Tanaka
patent: 5457625 (1995-10-01), Lim et al.
patent: 5587897 (1996-12-01), Iida
Robert K. Brayton, et al. A Survey of Optimization Techniques for Integrated-Circuit Design, Proceedings of the IEEE, vol. 69, No. 10, Oct. 1981, pp. 1334-1362.

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