Optimally staged cryopump

Details Optimally staged cryopump Optimally staged cryopump

1989-05-15

1990-01-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62100, 62268, 55269, 417901, B01D 800

Patent

active

048965111

ABSTRACT:
A cryopump which has three temperature stages for pumping gas. The third temperature stage is surrounded by and separated from the second temperature stage which is surrounded by and separated from the first temperature stage. Adsorbent placed on the second and third stage are operated at different temperatures to prevent gases with higher critical mobility temperatures from becoming immobilized at the entrance of pores and wells along the surface of the adsorbent.

REFERENCES:
patent: 3218815 (1965-11-01), Chellis et al.
patent: 4240262 (1980-12-01), Nakamura et al.
patent: 4336690 (1982-06-01), Welch
patent: 4479360 (1984-10-01), Bachler et al.
patent: 4546613 (1985-10-01), Eacobacci et al.
European Patent Application Publication No. 0053784, (Forth) Date: 6/16/82.

Affiliated with

Also associated with

Rating

Optimally staged cryopump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optimally staged cryopump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optimally staged cryopump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1917683