Optimally staged cryopump

Details Optimally staged cryopump Optimally staged cryopump

1990-01-25

1991-03-26

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

050019031

ABSTRACT:
A cryopump having at least two temperature stages for pumping gases at their optimal temperatures. A first embodiment has a third temperature stage that is surrounded by and separated from the second temperature stage which is surrounded by and separated from the first temperature stage. Adsorbent placed on the second and third stages are operated at different temperatures to prevent gases with higher critical mobility temperatures from becoming immobilized at the entrance of pores and wells along the surface of the adsorbent. Another embodiment has at least a second stage, a temperature sensor, and a heater to maintain the second stage temperature at optimal level for the gas being pumped.

REFERENCES:
patent: 3218815 (1965-11-01), Chellis et al.
patent: 4240262 (1980-12-01), Nakamura et al.
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4608866 (1986-09-01), Bergquist
patent: 4757689 (1988-07-01), Bachler et al.

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