Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-08-30
2011-08-30
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
08009269
ABSTRACT:
A lithographic system is provided in which an extent of overlap between pattern sections is adjusted in order to match a size of a pattern section to a size of a repeating portion of the pattern to be formed.
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Chilov Kamen Hristov
Cuperus Minne
Hintersteiner Jason Douglas
Troost Kars Zeger
Westeinde Ronnie Florentius Van T
Asfaw Mesfin T
ASML Holding N.V.
ASML Netherlands B.V.
Glick Edward J
Sterne Kessler Goldstein & Fox P.L.L.C.
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