Semiconductor device manufacturing: process – Manufacture of electrical device controlled printhead
Reexamination Certificate
2006-04-04
2006-04-04
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Manufacture of electrical device controlled printhead
C257S040000
Reexamination Certificate
active
07022534
ABSTRACT:
The height of the photo-resist layer “banks” which define pockets for inkjet printing or other patterned processes is optimized to provide a more uniform drying profile for substances which are to be deposited in those pockets and dried therein. Preferably, the height of the photo-resist layer is less than or equal to about three microns and more, preferably, about one micron.
REFERENCES:
patent: 6517996 (2003-02-01), Chao et al.
patent: 6762552 (2003-05-01), Duineveld et al.
patent: 6774392 (2004-08-01), Humbs et al.
Gupta Rahul
Ingle Andrew
Natarajan Sriram
Lee Calvin
Nelms David
Osram Opto Semiconductors GmbH
Sethuraman Anand
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