Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-10-06
2009-06-02
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S492000, C356S493000
Reexamination Certificate
active
07542149
ABSTRACT:
An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the reference beams impinge, wherein at least one of the mirrors can be displaced along a measuring axis. The optical assembly further includes a beam deflector, as well as a retro-reflector, wherein the measuring and the reference beams reflected at the measuring and the reference mirrors via the beam deflector and the retro-reflector are guided at least a second time in the direction toward the measuring and the reference mirrors and wherein the beam deflector is embodied as a plane-parallel plate.
REFERENCES:
patent: 5148235 (1992-09-01), Tank et al.
patent: 5333048 (1994-07-01), Michel et al.
patent: 6369951 (2002-04-01), Spanner
patent: 2003/0053073 (2003-03-01), Hill
patent: 2003/0197870 (2003-10-01), Bagwell et al.
patent: 0 481 356 (1995-09-01), None
patent: 1 031 868 (2003-05-01), None
Huber-Lenk Herbert
Spanner Erwin
Brinks Hofer Gilson & Lione
Chowdhury Tarifur
Dr. Johannes Heidenhain GmbH
LaPage Michael
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