Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-10-17
2006-10-17
Hollington, Jermele (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
Reexamination Certificate
active
07123035
ABSTRACT:
A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The arrangement is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.
REFERENCES:
patent: 3524694 (1970-08-01), Kelin
patent: 3711186 (1973-01-01), O'Connor
patent: 3912378 (1975-10-01), Goto
patent: 4634234 (1987-01-01), Baumann
patent: 5004307 (1991-04-01), Kino et al.
patent: 5208648 (1993-05-01), Batchelder et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5282088 (1994-01-01), Davidson
patent: 5475316 (1995-12-01), Hurley et al.
patent: 5852232 (1998-12-01), Samsavar et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 5940545 (1999-08-01), Kash et al.
patent: 5948972 (1999-09-01), Samsavar et al.
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6462814 (2002-10-01), Lo
patent: 6507433 (2003-01-01), Mecham et al.
patent: 6509750 (2003-01-01), Talbot et al.
patent: 6591121 (2003-07-01), Madarasz et al.
patent: 6621275 (2003-09-01), Cotton et al.
patent: 6818907 (2004-11-01), Stark
patent: 6828811 (2004-12-01), Hanson et al.
patent: 2003/0098692 (2003-05-01), Cotton et al.
patent: 2005/0002028 (2005-01-01), Kasapi et al.
patent: 2005/0073675 (2005-04-01), Lo
patent: 2006/0028641 (2006-02-01), Frank et al.
All-Solid-State Microscope-Based System for Picosecond Time-Resolved Photoluminescence Measurements on II-VI semiconductors, G. S. Buller et al., Rev. Sci. Instrum. pp. 2994, 63, (5), (1992).
Time-Resolved Photoluminescence Measurements in InGaAs/InP Multiple-Quantum-Well Structures at 1.3-m Wavelengths by Use of Germanium Single-Photon Avalanche Photodiodes, G.S. Buller et al., Applied Optics, vol. 35 No. 6, (1996).
Analysis of Product Hot Electron Problems by Gated Emission Microscope, Khurana et al., IEEE/IRPS (1986).
Ultrafast Microchannel Plate Photomultiplier, H. Kume et al., Appl. Optics, vol. 27, No. 6, 15 (1988).
Two-Dimensional Time-Resolved Imaging with 100-ps Resolution Using a Resistive Anode Photomultiplier Tube, S. Charboneau, et al., Rev. Sci. Instrum. 63 (11), (1992).
Novel Optical Probing Technique for Flip Chip Packaged Microprocessors, Mario Paniccia, Travis Eiles, V.R.M. Rao and Wai Mun Yee Proceedings of 1998 International Test Conference (ITC '98), Oct. 18-22, 1998, Washington, DC, IEEE Catalog No. RS00191.
Diagnosis and Characterization of Timing-Related Defects by Time-Dependent Light Emission, Dave Vallett, Leendert Huisman, and Phil Nigh; Proceedings of 1998 International Test Conference (ITC '98), Oct. 18-22, 1998, Washington, DC, IEEE Catalog No. RS00191.
Contactless Gigahertz Testing, W. Mertin, A. Leyk, U. Behnke, and V. Wittpahl, Proceedings of 1998 International Test Conference (ITC '98), Oct. 18-22, 1998, Washington, DC, IEEE Catalog No. RS00191:.
Picosecond Noninvasive Optical Detection of Internal Electrical Signals in Flip-Chip-Mounted Silicon Integrated Circuits, H. K. Heinrich, IBM J. Res. Develop. vol. 34, No. 2/3 1990.
Cotton Daniel
Frank Jonathan
Hanson John
Meluzzi Dario
Bach, Esq. Joseph
Credence Systems Corporation
Hollington Jermele
LandOfFree
Optics landing system and method therefor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optics landing system and method therefor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optics landing system and method therefor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3715811