Semiconductor device manufacturing: process – Making passive device
Patent
1998-08-19
2000-09-19
Nelms, David
Semiconductor device manufacturing: process
Making passive device
438 95, 438 96, 438 97, 438 98, 438102, 438106, 438455, 438459, H01L 2120
Patent
active
061211036
ABSTRACT:
A semiconductor window which is transparent to light in the infrared range and which has good electrical conductivity is formed of a prefabricated semiconductor sheet bonded to a substrate material by optical contact. The sheet is a substantially uniformly doped wafer sufficiently thin that inherent absorption bands do not affect transmission. The sheet is contact bonded to the surface of an undoped transparent substrate without diffusion, growth or deposition on the surface. Windows having particular optical band pass characteristics are formed utilizing a zinc selenide substrate and a gallium arsenide sheet.
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Article in Semiconductor Wafer Bonding: Science, Technology, and Applications U. Gosele et al., Eds. Proceeding of the first International Symposium, vol. 92-7, Published by the Electrochemical Society, Inc., 1992 entitled: Van der Waals Bonded III-V Films for Optoelectronics, by Chan, Winston K., and Yablonovitch, pp. 123-131.
McCoy Don L.
Sorensen Richard F.
Tully John W.
Anderson Terry J.
Hoang Quoc
Hoch Jr. Karl J.
Nelms David
Northrop Grumman Corporation
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