Stock material or miscellaneous articles – Surface property or characteristic of web – sheet or block
Patent
1984-05-18
1985-08-27
Dawson, Robert A.
Stock material or miscellaneous articles
Surface property or characteristic of web, sheet or block
29571, 29576J, 29584, 73432L, 156 64, 156378, B32B 700, G01B 1106
Patent
active
045378274
ABSTRACT:
A semiconductive substrate, such as a silicon wafer, is mounted on a baseplate for inclusion in an optical device such as a liquid crystal light valve. An optical flat presses the top surface of silicon wafer toward the baseplate and against an O-ring seal surrounding a fluid adhesive. The fluid adhesive hydrostatically distributes the force of compression to guarantee optical flatness and self-compensation for the amount fluid adhesive surrounded by the O-ring. The optical flatness of the semiconductor substrate is limited only by the flatness of the optical flat against which it is compressed. Parallel alignment of the optical flat, the substrate and the baseplate is achieved by reflecting a laser beam through the semiconductive substrate and observing the interference fringes therein, while adjusting the relative alignment so as to maximize the distance between fringes.
REFERENCES:
patent: 4072782 (1978-02-01), Kramer et al.
patent: 4340635 (1982-07-01), Langman et al.
patent: 4470856 (1984-09-01), Little et al.
Brown Roger H.
Efron Uzi
Hoberg Clarence P.
Little Michael J.
Dawson Robert A.
Hughes Aircraft Company
Karambelas A. W.
LandOfFree
Optically flat semiconductor baseplate structure does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optically flat semiconductor baseplate structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optically flat semiconductor baseplate structure will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2001471