Optically enhanced probe alignment

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

active

11369343

ABSTRACT:
A novel probe card that comprises a set of fiducials and a method for using the same are disclosed. The set of fiducials comprises a first fiducial and a second fiducial fixed relative to the probe card substrate. Comparing the relative positions of the fiducials determines whether the probes are in proper alignment. This can be performed by the unaided eye or by using a low powered microscope. This novel probe card may also be used with computer vision alignment methods, thus enhancing the speed and accuracy of the computer vision method.

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