Optical waveguides – Optical waveguide sensor
Reexamination Certificate
2008-05-27
2008-05-27
Wong, Eric (Department: 2883)
Optical waveguides
Optical waveguide sensor
C385S032000, C385S030000, C385S008000, C385S009000
Reexamination Certificate
active
11164916
ABSTRACT:
An optically coupled resonant pressure sensor includes a deformable diaphragm and an optically coupled resonator fixedly attached to the deformable diaphragm. The resonator includes a resonator body and a laterally offset photodiode adjacent to the resonator body. The resonator is driven by an electric field generated between the laterally offset photodiode and the resonator body when an incident light strikes the photodiode. Pressure applied to one side of the deformable diaphragm causes a shift in a resonant frequency of the resonator. Also disclosed are a method and system for determining pressure.
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Burns David W.
Wong Eric
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