Optically controlled dimpler for preparation of ultrathin sample

Details Optically controlled dimpler for preparation of ultrathin sample Optically controlled dimpler for preparation of ultrathin sample

1989-03-16

1989-12-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156636, 156645, 156662, 156626, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048850519

ABSTRACT:
A dimpler for grinding a spherical dimple into and partially through a sample so as to form very thin portions of the sample around the perforation suitable for transmission electron microscopy. The sample is held on stage rotating about a vertical axis and a wheel rotating about a horizontal axis is brought into contact with the rotating sample. A first light path is formed across a diameter of the wheel and a second light path is formed vertically downward through the stage. A laser shines light downwardly to the rotating wheel so that the rotating wheel chops the light by the time it strikes the sample being ground. When the sample is perforated, a photodetector at the bottom of the second light path first detects the chopped light and immediately causes the grinding to halt by lifting the wheel away from the sample. The dimpling is performed by dripping an etchant onto a relatively soft wheel and the etchant is rinsed automatically upon perforation.

REFERENCES:
patent: 3019564 (1962-02-01), Haracz
patent: 4588473 (1986-05-01), Hisatomi et al.
patent: 4793895 (1988-12-01), Kaanta et al.

Affiliated with

Also associated with

Rating

Optically controlled dimpler for preparation of ultrathin sample does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optically controlled dimpler for preparation of ultrathin sample, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optically controlled dimpler for preparation of ultrathin sample will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2032480