Optics: measuring and testing – For light transmission or absorption
Reexamination Certificate
2006-02-21
2006-02-21
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
For light transmission or absorption
Reexamination Certificate
active
07002689
ABSTRACT:
An optically-based system and method are disclosed for detecting surface pits and their average depth in a metal film by an examination of pulse shape in a reflected probe beam pulse. Also disclosed is an optically-based system and method for detecting an occurrence of a failure in a CMP process by detecting surface pits in a metal film by an examination of pulse shape in a reflected probe beam pulse. Also disclosed is an optically-based system and method for providing quality indications to a CMP process for enabling control of the CMP process by detecting surface pits in a metal film by an examination of pulse shape in a reflected probe beam pulse, where the pulse shape has a twin peak shape that is indicative of a presence of a surface pit.
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Liu Hengda
Xie Joseph Z.
Harrington & Smith ,LLP
Nguyen Tu T.
Rudolph Technologies, Inc.
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