Optical zoom system for a light scanning electron microscope

Details Optical zoom system for a light scanning electron microscope Optical zoom system for a light scanning electron microscope

2004-10-19

2009-02-10

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S216000, C250S201300, C359S368000, C359S380000

Reexamination Certificate

active

07488931

ABSTRACT:
For a confocal scanning electron microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

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