Optical zoom system for a light scanning electron microscope

Details Optical zoom system for a light scanning electron microscope Optical zoom system for a light scanning electron microscope

2008-05-06

2008-05-06

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

Reexamination Certificate

active

10967335

ABSTRACT:
For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

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