Optical waveguides grown by selective liquid phase epitaxy

Details Optical waveguides grown by selective liquid phase epitaxy Optical waveguides grown by selective liquid phase epitaxy

1976-07-29

1978-09-26

Corbin, John K.

G02B 514

Patent

active

041165306

ABSTRACT:
This disclosure concerns optical waveguides of arcuate structure fabricated by selective liquid phase epitaxy. In integrated optical circuits requiring complex processing, it will be necessary to utilize at relatively low light losses bends, curves, and dividers in the waveguide section. The arcuate optical waveguides described herein have a region of higher index of refraction surrounded by lower effective index media to confine and propagate light between active components of an integrated optical circuit. Optical waveguides extending around bends are grown by selective liquid phase epitaxy employing a horizontal graphite boat with sliding compartments, wherein multiple layers of Ga.sub.1-x Al.sub.x As(0.ltoreq.x.ltoreq.0.3) are grown. For a relatively low radius of curvature where r.sub.c = 10 mils, the angle is dominated by a sharp facet, with the faceting slowly decreasing as the radius of curvature increases, until at r.sub.c = 25 mils, substantially smooth sides are formed around the bend of the optical waveguide. One specific configuration of an arcuate optical waveguide structure is a y-shaped waveguide, where each of its legs may have a different specific radius of curvature.

REFERENCES:
patent: 3850503 (1974-11-01), Riseberg
patent: 4007978 (1977-02-01), Holton
Ralston et al., "Double Heterostructure Pb.sub.1-x Sn.sub.x Te Waveguide at 10.6 .mu.m" Applied Physics Letters vol. 26, No. 5, Jan. 15, 1975 pp. 64-66.

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