Optical waveguides and grating structures fabricated using...

Details Optical waveguides and grating structures fabricated using... Optical waveguides and grating structures fabricated using...

2006-01-10

2006-01-10

Palmer, Phan T. H. (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S037000, C385S014000

Reexamination Certificate

active

06985663

ABSTRACT:
Using polymeric dielectric materials (preferably materials derived from bisbenzocyclobutene monomers) and an electron beam lithography process for patterning this material, we have developed a process for fabricating optical waveguides with complex integrated devices such as gratings. Such gratings are not limited to one-dimensional type gratings but can include 2 dimensional gratings such as curved gratings or photonic crystals. Due to the properties of BCB, this process could also be implemented using optical photolithography depending upon the waveguide dimensions desired and the grating dimensions desired. Alternatively, the optical waveguide could be patterned using optical lithography and the grating can be patterned using electron beam lithography. In addition, the general process described below can be applied to the fabrication of complex lightwave circuits containing, for example, multiple optical waveguides, couplers/splitters, grating based filters and even more complex devices and structures.

REFERENCES:
patent: 4724260 (1988-02-01), Kirchhoff et al.
patent: 4812588 (1989-03-01), Schrock
patent: 5136069 (1992-08-01), DeVries et al.
patent: 5138081 (1992-08-01), DeVries et al.
patent: 5264646 (1993-11-01), DeVries et al.
patent: 6083661 (2000-07-01), Oaks et al.
patent: 6421472 (2002-07-01), Moroni et al.
patent: 6819845 (2004-11-01), Lee et al.
patent: 6826333 (2004-11-01), Catchmark et al.
International Search Report dated Apr. 17, 2003 from corresponding PCT Application No: PCT/US02/23740.

Affiliated with

Also associated with

Rating

Optical waveguides and grating structures fabricated using... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical waveguides and grating structures fabricated using..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical waveguides and grating structures fabricated using... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3567074