Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – In combination with or also constituting light responsive...
Reexamination Certificate
2005-03-08
2005-03-08
Pham, Long (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
In combination with or also constituting light responsive...
C257S013000, C257S022000, C257S094000, C257S103000, C257S184000, C257S432000
Reexamination Certificate
active
06864512
ABSTRACT:
A semiconductor waveguide is disclosed which includes a substrate coated with a cladding. A core is embedded in the cladding. The core includes a plurality of discreet stacked layers of core material surrounded by cladding material. The cladding and core layers each include silica and silicon nitride with the core layers having a higher nitrogen content than the cladding material. The core is fabricated by carefully manipulating the process parameters of a PECVD process.
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Intel Corporation
Louie Wai-Sing
Marshall & Gerstein & Borun LLP
Pham Long
LandOfFree
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