Optical waveguide structures and formation methods

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

G02B 600, G02B 636

Patent

active

052631117

ABSTRACT:
A method is provided for forming an optical waveguide structure upon a substrate in accordance with the steps of: (a) forming a layer of base coat material upon the substrate, (b) forming a layer of cladding material having a predetermined refractive index upon the base coat layer, (c) applying a channel waveguide pattern defining structure to the layer of cladding material, (d) applying a patterning agent to transfer the pattern of the channel waveguide pattern defining structure to a predetermined depth or depths into the cladding material layer to define a waveguide trench pattern, (e) removing any remaining residue of channel waveguide pattern defining structure, (f) forming a thick coat layer of waveguide material having a higher refractive index than the cladding material onto the cladding material and into the waveguide trench pattern, (g) planarizing the waveguide material substantially to the plane of a topmost surface of the cladding material in order to reduce the thickness of the thick coat layer, and (h) forming a layer of additional cladding material to encapsulate the waveguide material in the waveguide trench pattern. An out-of-plane mirror can be used to couple two different layers together optically. A lens element can be used for collimating light reflected by the out-of-plane mirror.

REFERENCES:
patent: 4423922 (1984-01-01), Porter
patent: 4447118 (1984-05-01), Mulkey
patent: 4630255 (1986-12-01), Gouali et al.
patent: 4707064 (1987-11-01), Dobrowolski et al.
patent: 4904036 (1990-02-01), Blonder et al.
patent: 4908333 (1990-03-01), Shimokawa et al.
patent: 4912022 (1990-03-01), Urquhart et al.
patent: 4932743 (1990-06-01), Isobe et al.
Selvaraj et al., "Integrated Optical Waveguides in Polyimide for Wafer Scale Integration", IEEE J. Lightwave Technol., vol. 6, No. 6 (Jun. 1988), pp. 1034-1044.
Kokubun et al., "Silicon Optical Printed Circuit Board for Three-Dimensional Integrated Optics," Electron, Lett., vol. 21, No. 11 (1985), pp. 508-509.
Hartman et al., "Radiant Cured Polymer Optical Waveguides on Printed Circuit Boards for Photonic Interconnecton Use," Appl. Optics, vol. 28, No. 1 (Jan. 1989), pp. 40-47.
Sullivan et al., "Guided-wave Optical Interconnects for VLSI Systems," SPIE vol. 881 Optical Computing and Nonlinear Materials (1988), pp. 172-176.
Sullivan, "Optical Waveguide Circuits for Printed Wire-Board Interconnections," SPIE vol. 994 Optoelectronics Materials, Devices, Packaging and Interconnects II (1988), pp. 92-100.
Grande et al., "One-Step Two-Level Etching Technique for Monolithic Integrated Optics," Appl. Phys. Lett., vol. 51, No. 26 (Dec. 1987), pp. 2189-2191.
Hartmann et al., "Board Level High Speed Photonic Interconnections: Recent Technology Developments," SPIE vol. 994 Optoelectronic Materials, Devices, Packaging and Interconnections II (1988), pp. 57-64.
Hartman, "Digital High Speed Interconnects: A Study of the Optical Alternative," Optic, Eng. vol. 25, No. 10 (1986) pp. 1086-1102.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Optical waveguide structures and formation methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical waveguide structures and formation methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical waveguide structures and formation methods will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-27603

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.