Optical waveguide structure including reflective asymmetric cavi

Details Optical waveguide structure including reflective asymmetric cavi Optical waveguide structure including reflective asymmetric cavi

1992-03-05

1993-01-26

Healy, Brian

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385130, 385 14, G02B 610

Patent

active

051827875

ABSTRACT:
A turning mirror in an optical waveguide structure is made by etching in the upper surface of the structure a cavity (18) that intercepts the path of light propagated by the waveguide (15, 16, 13). Preferably, the cavity is made to be asymmetric with the side (25) of the cavity remote from the waveguide sloping at typically a forty-five degree angle. The asymmetry can be introduced by using mask and etch techniques and treating the surface of the structure such that the etchant undercuts the mask on the side of the cavity remote from the waveguide to a greater extent than it undercuts the mask on the side of the cavity adjacent the waveguide.

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