Optical waveguide probe and optical system and atomic force micr

Details Optical waveguide probe and optical system and atomic force micr Optical waveguide probe and optical system and atomic force micr

1997-02-07

1999-10-19

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

059698217

ABSTRACT:
An optical waveguide probe comprises a cantilever having a longitudinal axis, a fixed end and a free end, the free end being elastically displaceable by application of a force to the cantilever. A probe is disposed on the free end of the cantilever for undergoing displacement in a direction generally perpendicular to a surface of a sample during elastic displacement of the cantilever. The probe extends in a direction generally perpendicular to the longitudinal axis of the cantilever. An optical waveguide is disposed in the cantilever and extends from the fixed end of the cantilever to the probe for transmitting light applied to or detected from the surface of the sample. The optical waveguide has a first optical waveguide portion extending generally along the longitudinal axis of the cantilever and a second optical waveguide portion extending generally in the direction of extension of the probe.

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