Optics: measuring and testing – Optical pyrometers – With incandescent standard
Reexamination Certificate
2001-11-29
2004-09-14
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Optical pyrometers
With incandescent standard
C356S043000, C356S030000, C356S131000
Reexamination Certificate
active
06791675
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an optical waveguide path coupling structure and a coupling method of an optical waveguide path, an optical waveguide path and its manufacturing method, and an optical device part with the optical waveguide path and its manufacturing method. More particularly, the present invention relates to the optical waveguide path coupling structure and the coupling method of the optical waveguide path, the optical waveguide path and its manufacturing method, and the optical device part with the optical waveguide path and its manufacturing method using a film in which upper and lower surfaces of a core layer are coated with an upper clad layer and a lower clad layer.
The present application claims priority of Japanese Patent Application No. 2000-366411 filed on Nov. 30, 2000, which is hereby incorporated by reference.
2. Description of the Related Art
Optical communication technology utilizing light as a transmission medium of information has been widely used. To execute such optical communication technology, an optical waveguide path coupling structure (an optical module) is used where optical device chips, such as a light-emitting device and a light-receiving device are provided on an optical device substrate and the optical device chips are optically coupled with each other via an optical waveguide path. It is required that information is transmitted in the optical waveguide path suppressing attenuation of light in order to perform such optical transmission.
FIG. 34
is a sectional view showing an example of a conventional optical waveguide path coupling structure. An optical waveguide path coupling structure
100
, as shown in
FIG. 34
, includes: a quarts glass substrate
105
attached with a film
104
in which upper and lower surfaces of a core layer
101
are coated with an upper clad layer
102
and a lower clad layer
103
; and an optical device substrate
107
attached with an optical device chip
106
such as a PD (a photo diode) or a VCSEL (a vertical cavity surface emitting laser).
A specular surface
108
having a slope approximately slanting by 45 degrees is formed on one end of the film
104
, and light transmitted through the core layer
101
as shown by an arrow from the other end of the film
104
as the optical waveguide path is made to convert its optical path in an vertical direction by the specular surface
108
. Then, light vertically converted is converted into a parallel light by a first micro lens
109
arranged on a rear surface of the quarts glass substrate
105
to be emitted toward the optical device chip
106
.
On the other hand, a second micro lens
110
is arranged on a position, which opposes to the first micro lens
109
on the optical device chip
106
of the optical waveguide path, via a resin layer
111
, and the light emitted from the first micro lens
109
is made incident to the second micro lens
110
and received by the optical device chip (the light-receiving device in this case)
106
via the resin layer
111
. On the contrary, when the light-emitting device is used as the optical device chip
106
, the light emitted from the light-emitting device is made incident from the second micro lens
110
to the first micro lens
109
and passes the core layer
101
of the film
104
as the optical waveguide path traveling through an opposite route in the foregoing case. Note that both the quarts glass substrate
105
and the optical device substrate
107
are assembled on a base substrate
113
such as a printed substrate via bumps
112
.
However, since the conventional optical waveguide path coupling structure
100
requires the micro lenses
109
,
110
to convert the light passing through the optical waveguide path into the parallel light and the micro lenses
109
,
110
must be aligned in a predetermined position with high accuracy, there exists a problem that a manufacturing cost increases.
Specifically in
FIG. 34
, since the micro lens
109
must be arranged in the predetermined position with high accuracy of approximately 1 &mgr;m in order to arrange the micro lens
109
on the quarts glass substrate
105
, a highly accurate alignment operation is required for arranging the micro lens
109
, and thus increase of the manufacturing cost has been inevitable.
SUMMARY OF THE INVENTION
In the view of the above, it is an object of the present invention to provide an optical waveguide path coupling structure and a coupling method of an optical waveguide path, the optical waveguide path and its manufacturing method, and an optical device part with the optical waveguide path and its manufacturing method, whereby a highly accurate alignment is unnecessary.
According to a first aspect of the present invention, there is provided an optical waveguide path coupling structure where a first optical waveguide path including a first core layer and a second optical waveguide path including a second core layer are optically coupled, wherein the first optical waveguide path arranged on an optical device chip, which has a first cross section formed such that the first core layer is exposed as an oblique plane with a slight angle at an end portion and a second cross section formed in an approximately vertical direction to the first cross section at a position apart from the first cross section by a predetermined distance, and the second optical waveguide path arranged on a base substrate, which has a first cross section formed such that the second core layer is exposed as an oblique plane with a slight angle at an end portion and a second cross section formed in the approximately vertical direction to the first cross section at a position apart from the first cross section by a predetermined distance, are coupled by aligning the first cross sections and the second cross sections.
According to a second aspect of the present invention, there is provided an optical waveguide path including a film in which upper and lower surfaces of a core layer are multiply coated respectively by an upper clad layer and a lower clad layer, wherein a first cross section with a slight angle to an optical path direction is formed at an end portion side of the core layer on the film to expose the core layer, and a second cross section is formed having a predetermined cross angle with the first cross section.
In the foregoing second aspect, a preferable mode is one wherein the first cross section is a plane approximately perpendicular to a plane of the film.
Also, a preferable mode is one wherein the first cross section is a plane forming a predetermined cross section non-perpendicular to the plane of the film.
Further, according to a third aspect of the present invention, there is provided an optical waveguide path including a film with a lower clad layer, a core layer, a thin film upper clad layer, and a side clad layer having approximately a same height as the core layer, wherein the core layer for alignment used as the pattern for alignment is formed on the film other than the core layer and a first cross section with a slight angle to an optical path direction is formed at an end portion side of the core layer for the alignment to expose the core layer for the alignment, and a second cross section is formed having a predetermined cross angle with the first cross section to expose an end surface of the core layer.
According to a fourth aspect of the present invention, there is provided a manufacturing method of an optical waveguide path using a film in which upper and lower surfaces of a core layer are multiply coated respectively by an upper clad layer and a lower clad layer, the manufacturing method including the steps of: forming a first cross section with a slight angle to an optical path direction at an end portion of the film; measuring a position of the core layer exposed at the first cross section; and forming a second cross section with a predetermined angle from the optical path direction of the film at a position apart from the position of the core layer by a predetermined distance.
Accord
Ishido Kiminori
Kikuchi Hideo
NEC Toppan Circuit Solutions, Inc.
Stafira Michael P.
Valentin II Juan D
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