Optical waveguide, optical module and optical system using the s

Details Optical waveguide, optical module and optical system using the s Optical waveguide, optical module and optical system using the s

1996-08-29

1999-09-07

Sanghavi, Hemang

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385129, 65386, G02B 610

Patent

active

059499451

ABSTRACT:
An optical waveguide comprises an anhydrous synthetic silica glass substrate 1, which contains less than a predetermined concentration of hydroxyl group, a core waveguide 2 having a rectangular cross-section being formed on the substrate 1, and a cladding layer 3 having a lower refractive index thereof than the core waveguide 2 being covered by the cladding layer 3. The concentration of hydroxyl group contained in a synthetic silica glass substrate of an optical waveguide or an optical device is essentially less than 300 ppm, preferably less than 100 ppm, more preferably less than 50 ppm.

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patent: 5349456 (1994-09-01), Iwanaga et al.
patent: 5364433 (1994-11-01), Nishimura et al.
patent: 5543613 (1996-08-01), Bruce et al.

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