Optical waveguide microcantilever with differential output...

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing liquid or solid sample

Reexamination Certificate

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C422S050000, C422S051000, C422S051000, C422S051000, C422S051000, C422S068100, C422S082050, C422S082090, C436S043000, C436S063000, C436S164000, C436S169000, C436S172000, C356S073100

Reexamination Certificate

active

10793983

ABSTRACT:
A microcantilever sensing system includes a waveguide cantilever that permits an optical signal to propagate through an endface of the cantilever. The propagated signal is received by a receiver waveguide across a gap from the cantilever. The receiver waveguide provides the optical signal to a differential beamsplitter. The signal is differentially split according to the position of the optical signal incident upon the receiving waveguide. A method of determining a deflection waveguide microcantilever is also disclosed. An optical signal is transmitted from the endface of a waveguide microcantilever and received by the receiver waveguide. The optical signal is differentially split and then each split signal is compared to determine beam deflection. A method of fabricating a microcantilever sensor provides a differential beamsplitter in optical communication with a waveguide cantilever.

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