Optical waveguide, method of making the same and integrated opti

Details Optical waveguide, method of making the same and integrated opti Optical waveguide, method of making the same and integrated opti

1997-07-22

1999-05-11

Lee, John D.

Optical waveguides

Planar optical waveguide

385131, G02B6/10

Patent

active

059036974

ABSTRACT:
An optical waveguide 3 comprises a substrate like a Si substrate having a projection with a flat surface and inclined side surfaces thereon, a buffer layer having a refractive index of n.sub.0 formed on lower surfaces of the substrate, a secondary buffer layer having a refractive index of n.sub.0 formed on the buffer layer, a core waveguide having a refractive index of n.sub.1 formed on the secondary buffer layer and a cladding layer having a refractive index of n.sub.0 covering the core waveguide. The flat surface of the projection 31 is exposed through an opening. The secondary buffer layer controls a transmission loss increase caused by partial thickness differences of the ground buffer layer or scattering by scratches or strains created by the grind.

REFERENCES:
patent: 4637686 (1987-01-01), Iwamoto et al.
patent: 5719981 (1998-02-01), Katoh

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