Optical waveguide manufacturing method

Details Optical waveguide manufacturing method Optical waveguide manufacturing method

2006-08-22

2006-08-22

Pak, Sung (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S132000

Reexamination Certificate

active

07095934

ABSTRACT:
A method for manufacturing an optical waveguide of the present invention is one in which a mask is provided on the surface of a core layer followed by performing dry etching, and the dry etching step includes etching and ashing steps. With this, the irregularities formed on the periphery of a core pattern during manufacture of an optical waveguide can be eliminated, and an optical waveguide with a low optical transmission loss is proved.

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